MEMS... im detail
New standards to improve measurements of microdevices.
at the National Institute of Standards and Technology
(NIST), along with their colleagues at several companies,
are completing experiments that validate new standards
aimed at improving emerging new microelectromechanical
systems, or MEMS, devices.
Microaccelerometers, the devices used to activate automotive
airbags, are MEMS devices. In the future, microscopic
MEMs devices made with gears and motors may, for example,
be developed to clear blockages in arteries.
NIST scientists presented their findings at the semiconductor
industry's annual SEMICON West trade show, held July
12-16, 2004, in San Francisco.
Working with ASTM International, NIST has developed
three new standards aimed at helping researchers measure
more accurately several characteristics of materials
used to construct MEMS devices. With more accurate measurements
of microsystem materials, designers and manufacturers
hope to improve the design and performance of these
devices. Currently, laboratories measuring the properties
of similar device materials produce widely varying results.
Each new standard is a set of procedures for measuring
dimensions or a particular materials property. One standard
advances the "in-plane length" measurement
of a microsystem, or its length in one dimension, typically
from 25 micrometers to 1,000 micrometers. A second standard
would improve measurement of "residual strain,"
or the strain the parts of a microsystem undergo before
they relax after the removal of the stiff oxides that
surround them during manufacturing. The final standard
aims to improve measurement of the "strain gradient,"
which determines the maximum distance that a MEMS component
can be suspended in air before it begins to bend or
Six companies have been collaborating with NIST on a
so-called "round robin" experiment to validate
the MEMS standards. The standards should significantly
reduce variations in measurements between laboratories.
Contact: Scott Nance
National Institute of Standards and Technology (NIST)
story has been adapted from a news release -
Diese Meldung basiert auf einer Pressemitteilung -
tekst is gebaseerd op een nieuwsbericht -