| SCHÄRDING,
Austria – Feb. 1, 2005 – EV Group (EVG), a leading manufacturer
of MEMS, nano and semiconductor wafer-processing equipment,
today announced that it will open a joint cleanroom
facility in Korea with its agent Jinsan Scientific Co.
Ltd. and Jinsan Micro-Engineering Ltd. (JML). The new
facility is located at the Technology Innovation Center
of Sung Kyun Kwan University (SKKU) in Suwon, Korea.
The
JML lab is designed for MEMS and advanced-packaging
processes as well as for nanoimprint lithography,
and contains a state-of-the-art Class 100 cleanroom.
As the lead equipment supplier for the facility, EV
Group will provide tools for advanced lithography
and wafer-bonding processes. These include an EVG6200
Infinity mask-and-bond aligner, an EVG520HE semi-automated
wafer-bonding and hot-embossing system and an EVG101
spin-and-spray coating system. All systems are capable
of processing wafers and substrates up to 200mm. Other
equipment suppliers for the cleanroom include Surface
Technology Systems plc, technotrans AG and Raith GmbH.
“This
collaborative, state-of-the-art facility will be a
core site to perform research, run sample processes
and qualify processes in close proximity to the Korean
customer base,” said Dr. Peter Podesser, chief executive
officer of EV Group. “In addition, we can significantly
increase our presence in the Korean market and offer
high-level technology support with equipment that
is clearly focussed to cover all well-established
processes and technologies, including spin-and-spray
coating, lithography and bonding, as well as nanoimprint
and hot-embossing processes.”
In conjunction with the official
opening of the facility on March 10, a two-day workshop
on nanoimprint lithography and wafer-level packaging
will be held on March 10-11 at the Technology Innovation
Center. The workshop will feature sessions by EV Group,
technotrans and Raith, as well as leading research
organizations in the Asian region, such as Waseda
University, and the Korea Institute of Machinery and
Materials (KIMM).
About Jinsan Scientific
Founded in 1992, Jinsan Scientific Co., Ltd. and JML
(Jinsan Micro-Engineering Ltd.) are supplying equipment
for MEMS and Nanotechnology, as well as providing
foundry service for applications such as MEMS and
NEMS. Equipment includes EV Group’s spin/spray coater,
mask aligner, wafer bonder, UV Imprint and hot-embossing
equipment, an STS Deep Si Etcher, technotrans’ electroplating
system for stamp manufacturing of nanotechnology,
and a Raith E-Beam Lithography System for nano-patterning.
For more information, visit www.jinsanco.co.kr.
Jinsan Scientific Co., Ltd
3F Hwajin Bldg, 13-2, Woomyun-Dong,
Seocho-Gu, Seoul, Korea
Tel: 822-578-4271
fax: 822-578-4274
About EV Group
Founded in 1980, EV Group is a global supplier of
wafer bonders, aligners, photoresist coaters, cleaners
and inspection systems for semiconductor, MEMS and
emerging nanotechnology markets. EV Group holds the
dominant share of the market for wafer bonding equipment
(especially SOI bonding) and is a leader in lithography
for advanced packaging, MEMS and nanotechnology. The
company’s unique Triple I approach (Invent – Innovate
– Implement) is supported by a vertical infrastructure,
allowing EV Group to respond quickly to new technology
development, apply the technology to manufacturing
challenges and expedite volume production. Headquartered
in Schärding, Austria, EV Group operates via
a global customer support network, with subsidiaries
in Tempe, Arizona; Albany, New York; Yokohama and
Fukuoka, Japan; and Chung-Li, Taiwan. For more information,
visit www.EVGroup.com <http://www.evgroup.com/>
.
Contacts:
Agency Contact:
Luz Rodriquez
Loomis Group
+ 33 (0) 1.58.18.59.30
rodriguezl@loomisgroup.com
Company Contact:
Dr. Ursula Deinhammer
EV Group
+ 43.77.12.53.11.40.09
U.Deinhammer@EVGroup.com
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