Vantaa,
Finland, ---December 21, 2005 Beneq and the Microelectronics Centre at Micronova
announced that following to the delivery of Beneq's
ALD (Atomic Layer Deposition) reactor TFS 500 to
Micronova, parties have entered into a long term
collaboration agreement where the aim is to study
and develop a wide range of thin film and surface
treatment technologies and applications.
As part of the agreement, Beneq will deliver a new
ALD reactor to be installed in Micronova's state-of-the
art clean room. The reactor will be utilized for
various research and development purposes as well
as for verifying the use of ALD in new industrial
applications. Beneq and Micronova will share the
use of the reactor so that it will best serve the
interest of both parties. Beneq plans to utilize
the new reactor to serve as it's R&D platform
and will implement new features into the reactor
from time to time.
During the collaboration Micronova will provide Beneq
with research and development services in order to
support Beneq's own R&D program as well as the
various needs of Beneq's customers. By working together
Micronova and Beneq will be able to address the fast
developing requirements and challenges in surface-
and nanotechnologies.
Atomic layer deposition (ALD) is a chemical deposition technique, which allows
the controlled growth of insulating and conducting thin films with atomic precision.
ALD thin films have important applications in microelectronics, optical equipment,
sensors, biomaterials and nanotechnology.
About Beneq Oy:
Beneq Oy, Vantaa, Finland, is a supplier of industrial equipment for global
markets. Beneq is addressing the market of industrial equipment for producing
functional surfaces with latest technology, typically utilizing nanosize
materials. Beneq acts as a business facilitator adding value for high-tech
partner companies by converting proven innovations into industrial equipment.
About MICRONOVA:
MICRONOVA is the leading centre for micro- and nanotechnology research in Finland,
with R&D groups from the Helsinki University of Technology (TKK ) and
Technical Research Centre of Finland (VTT ). The central research focus includes
micro-, nano-, and optoelectronic devices, materials, sensors, microsystems
and microfabrication techniques.
Contact:
Mr. Sampo Ahonen
CEO, Beneq Oy, Vantaa, Finland
+358 40 520 1090
sampo.ahonen@beneq.com
Dr. Veli-Matti Airaksinen
Director, Microelectronics Centre, Micronova
Helsinki University of Technology
Espoo, Finland
+358 9 451 6075
veli-matti.airaksinen@tkk.fi
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