CLARA, Calif.--(BUSINESS WIRE)--Jan. 13, 2005--Applied
Materials, Inc. (Nasdaq:AMAT - News) and IMEC*, Europe's
leading independent nanoelectronics and nanotechnology
research center, are working together to develop 45nm-generation
transistor-level semiconductor processing technologies.
Since this collaboration is targeted for critical ultra-shallow
junction, gate stack and strain engineering programs,
Applied Materials will provide IMEC with the industry's
most advanced transistor fabrication technologies, the
Applied Quantum® X Implant, the Applied Vantage
Radiance(TM) Plus RTP, the Applied Centura® Gate
Stack and the Applied Producer® CVD systems.
Dr. Luc Van den hove, vice president, Silicon Process
and Device Technology of IMEC, said, "We have enjoyed
a close relationship with Applied Materials for many
years and we continue to be impressed by the high level
of technological expertise Applied brings to our joint
development programs. We expect this cooperative arrangement
to help accelerate our 45nm programs and push the boundaries
of front-end process technology rapidly beyond 45nm
to even smaller device nodes."
For ultra-shallow junction
development, IMEC purchased Applied Materials' single-wafer
high current Quantum X implant system with high-tilt
capabilities for 45nm and beyond precision and a Vantage
Radiance Plus RTP system for annealing. To develop
advanced gate structures, IMEC selected Applied's
Gate Stack system, with chambers for oxide growth,
decoupled plasma nitridation, RTP post-nitridation
anneal and polysilicon deposition. IMEC's Applied
Producer CVD systems include HARP(TM) and ultra-high
stress nitride film processes that enable enhanced
performance through strain engineering and Applied's
Advanced Patterning Film(TM) process for optimized
"Applied Materials strongly
supports IMEC's efforts and capabilities to advance
the state of semiconductor technology," noted
Dr. Randhir Thakur, vice president and general manager
of Applied Materials' Front End Products group. "Applied
is focused on providing manufacturing systems to enable
transistor scaling to 45nm and beyond, so it's a natural
fit for us to collaborate with IMEC on its leading-edge
transistor development. We are working together on
a number of key initiatives, including advanced gate
stack technologies, ultra-shallow junction and strain
engineering, and look forward to further strengthening
our relationship as we collaborate on these important
45nm transistor programs."
Applied's work with IMEC is
part of IMEC's nanoelectronics research platform which
has many leading semiconductor manufacturers as core
members, including the top three European chipmakers,
Infineon, STMicroelectronics, and Philips Semiconductor,
as well as Intel, Samsung, Matsushita, Texas Instruments
Applied Materials, Inc., headquartered
in Santa Clara, California, (Nasdaq: AMAT - News)
is the largest supplier of equipment and services
to the global semiconductor industry. Applied Materials'
web site is www.appliedmaterials.com.
IMEC: Interuniversitair Micro-Elektronica
Applied Materials, Inc.
Betty Newboe, 408-563-0647 (Editorial/Media)
Paul Bowman, 408-563-1698 (Financial Community)
Source: Applied Materials, Inc.