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Nano
Electronics...Nano
Elekronik
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Elektronica |
BOC
Edwards and IMEC Announce Joint Technology Program
on Supercritical Carbon Dioxide Processing
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SAN
FRANCISCO--(BUSINESS WIRE)--July 12, 2004--BOC Edwards
announced today it has established a joint development
program with IMEC, a leading independent nanoelectronics
and nanotechnology research center in Leuven, Belgium.
The program focuses on the application of supercritical
CO2 (scCO2) cleaning processes for the manufacture of
next-generation semiconductor devices. BOC Edwards,
a major supplier of subsystems and materials for electronics
manufacturing, has shipped an integrated supercritical
CO2 processing system, including its DFP 200 high-pressure,
single-wafer process module to IMEC. This supercritical
CO2 technology demonstrator will be used in a three-year
process development program.
The application of scCO2 for all process steps where
the use of water needs to be avoided will be assessed.
The program will start with the investigation of the
use of scCO2 for the cleaning of advanced porous low-k
materials.
"Focusing on the unique integration options afforded
by supercritical CO2 with a well-respected research
center like IMEC is an important step in realizing the
potential of this enabling technology," said Chris
Case, BOC Edwards' chief technology officer. "This
collaboration will build from a baseline of state-of-the-art
process technology, and help us to understand the range
of applications where scCO2 is uniquely enabling."
Due to the continuous shrinking of semiconductor logic
device dimensions and the introduction of new materials
in IC manufacturing, the use of aqueous processes will
become problematic. Supercritical CO2 -based wafer processing
is an emerging technology for manufacturing next-generation
chips. The low viscosity and surface tension of CO2
allows for efficient cleaning of small feature sizes.
"Supercritical CO2 is a promising technology for
several sub-45nm process steps. This collaboration with
a leading supplier of semiconductor process-enabling
subsystems, is a valuable part of our sub-45nm CMOS
research programs in which we investigate all the major
process steps to continue scaling of CMOS" said
Luc van den Hove, Vice President Silicon Process and
Device Technology at IMEC.
IMEC is a world leading independent research center
in nanoelectronics and nanotechnology. Its research
focuses on the next generations of chips and systems,
and on the enabling technologies for ambient intelligence.
IMEC's research bridges the gap between fundamental
research at universities and technology development
in industry. Its unique balance of processing and system
know-how, intellectual property portfolio, state-of-the-art
infrastructure and strong network of companies, universities
and research institutes worldwide, positions IMEC as
a key partner with which to develop and improve technologies
for future systems.
IMEC is headquartered in Leuven, Belgium and has representatives
in the U.S., China and Japan. Its staff of more than
1200 people includes over 380 industrial residents and
guest researchers. In 2003, its revenues were EUR 145
million.
Future information on IMEC can be found on www.imec.be.
BOC Edwards, part of The BOC Group plc, is a leading
supplier of materials, process-enabling subsystems and
services to fabs and OEMs involved in the manufacture
of microelectronics devices. Serving two million customers
in more than 50 countries, The BOC Group is one of the
largest and most global of the world's leading gases
companies, with annual sales of over GBP 4.3 billion
(more than US $7 billion) in 2003. Information on the
BOC Group can be accessed by visiting the Group web
site, www.boc.com. Specific information on BOC Edwards
can be accessed directly on www.bocedwards.com or e-mail:
info@bocedwards.com.
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This
story has been adapted from a news release -
Diese Meldung basiert auf einer Pressemitteilung -
Deze
tekst is gebaseerd op een nieuwsbericht - |
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