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SAN
JOSE, Calif.--(BUSINESS WIRE)--Aug. 10, 2004--Silicon
Genesis Corporation (SiGen) announced today that it
has successfully developed a new wafer-level strained
substrate technology, called "Next-Generation
Strain" or NGS. NGS features uniaxial strain
instead of biaxial strain and avoids the mobility
degradation and the high defect levels associated
with current silicon-germanium (SiGe) based biaxially
strained silicon or strained silicon on insulator
(s-SOI). Several chip manufacturers, including Intel
and Texas Instruments, have successfully demonstrated
the significant benefits of uniaxial strain at the
transistor level. Intel pioneered the use of uniaxial
strain-enhanced transistor technology and is already
using it in its 90nm process. Until today, only local
transistor-level uniaxial strain has been available.
SiGen is changing that with the introduction of the
NGS wafer-level strained substrate.
Francois J. Henley, President
and CEO of Silicon Genesis, said, "We are very
excited about our new global uniaxial strain technology.
This new material offers the potential for significant
mobility enhancements over SiGe-based biaxial strain
wafer technologies and is compatible with local straining
approaches since the strains are additive. It also
features very low defect levels due to SiGen's use
of its proprietary low-temperature processing technology.
It can be directly integrated on silicon as an "epi-like"
strained bulk wafer or on an insulator as a strained
silicon-on-insulator wafer (s-SOI). The incremental
production costs are expected to be significantly
lower than biaxial technologies because it avoids
the costly steps of growing and relaxing thick silicon-germanium
layers."
Dr.
Scott Thompson, Associate Professor of the University
of Florida's Department of Electrical and Computer
Engineering and former Intel Fellow Director of Intel's
90nm Logic Technology and Strained Silicon Program,
commented, "Uniaxial strain is now being recognized
as the preferred strain type for deep-submicron device
applications, and its local variant has displaced
global biaxial strain as the mobility enhancer of
choice. Biaxial strain has been plagued with process
integration issues such as high defect levels and
germanium interdiffusion, but more importantly is
much less efficient in boosting PMOS transistor performance.
Local uniaxial strain processes are already enhancing
90nm performance at many companies. The availability
of a global uniaxially strained substrate can work
with these existing approaches to substantially improve
total transistor performance and has scaling advantages
over local strain at the 45nm node and beyond. I look
forward to the introduction and use of this new technology."
In
line with SiGen's new IP business model strategy,
the company is actively pursuing the development and
commercialization of NGS with a number of partners.
The company believes there will be significant interest
in the NGS technology and that this wafer-level uniaxial
strained material will have the potential to become
the strained silicon substrate of choice.
About
Silicon Genesis
Founded
in 1997, Silicon Genesis Corporation (SiGen) is a
leading provider of Silicon-On-Insulator (SOI) process
technology targeted for use in the production of engineered
wafers that enable NanoTechnology applications with
next generation products. Headquartered in San Jose,
California (Silicon Valley), the Company's proprietary
NanoCleave(TM)(Layer-transfer), NanoBond(TM) (Plasma-activated
bonding), and NanoSmooth(TM)(Epi Smoothing/Epi Thickening)
process steps have allowed SiGen to become a leading
provider of innovative substrates through its process
licensing. SiGen promotes its layer-transfer and engineered
wafer technologies by continued development of its
advanced process and equipment technologies as well
as through strategic alliances. For more information
on Silicon Genesis, visit http://www.sigen.com.
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