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Nano
Electronics...Nano
Elekronik
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ASM
International Announces Strategic Partnership with
IMEC
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BILTHOVEN,
The Netherlands, October 11, 2004 - ASM International
N.V. (NASDAQ: ASMI and Euronext Amsterdam: ASM) announced
today that it has entered into an agreement with IMEC,
Europe's leading independent nanoelectronics and nanotechnology
research center, to deliver a full suite of its most
advanced 300mm Front-end-of-the-Line semiconductor
wafer processing equipment to IMEC, and to participate
in several of IMEC's research programs as a strategic
partner. The equipment is expected to be delivered
in 4th quarter 2004 and 2005. The strategic partnership
agreement includes participation for three years in
IMEC's 300mm, sub-45 nm related technology development
programs.
The Front-end-of the-Line, 300mm equipment includes
a Polygon® ALCVD(TM) system for Atomic Layer Deposition
of gate insulators and gate electrodes, a Levitor®
Rapid Thermal Processing system for the formation
of junctions and contacts in very small sub-45 nm
transistors, and an Epsilon® Epitaxy system for
the formation of advanced transistor structures with
improved current carrying capability. The equipment
also includes the A412(TM) vertical furnace, for general,
multiple applications in the IMEC pilot line.
"IMEC will use this equipment to research very
advanced devices with feature sizes of 45 nm and less,
employing new materials, new structures and new processing
methods" says Ivo Raaijmakers, Chief Technology
Officer and Director of R&D of ASM International's
Front-end Operations. "Together, the equipment
set can be used to produce almost all materials for
transistor and memory structures foreseen in the nanotechnology
era", he added.
ASM International has had a presence on the IMEC premises
since 1994, when it moved its European demonstration
and process research laboratories to Leuven. ASM Belgium
was incorporated as a research center in 2000. ASM
Belgium, IMEC researchers and IMEC's partner researchers
will jointly realize the required processing capability
for the sub-45 nm devices.
"The extension of our long term partnership with
IMEC by participation in these research programs allows
us to refine and test our equipment well ahead of
the production needs of our customers.", said
Arthur del Prado, CEO and President of ASM International.
"This is expected to allow faster introduction
of enabling new technologies in the market",
he commented.
About ASM
With headquarters in Bilthoven, the Netherlands, ASM
International N.V. and its subsidiaries design and
manufacture equipment and materials used to produce
semiconductor devices. ASM International and its subsidiaries
provide production solutions for wafer processing
(Front-end segment) as well as assembly and packaging
(Back-end segment) through facilities in the United
States, Europe, Japan and Asia. ASM International's
common stock trades on NASDAQ (symbol ASMI) and the
Euronext Amsterdam Stock Exchange (symbol ASM). For
more information, visit ASMI's website at http://www.asm.com.
Contacts
:
Robert
L. de Bakker + 31 30 229 85 40
Erik Kamerbeek + 31 30 229 85 00
Mary Jo Dieckhaus + 1 212 986 29 00
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www.nano-tsunami.com
This
story has been adapted from a news release -
Diese Meldung basiert auf einer Pressemitteilung
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Deze
tekst is gebaseerd op een nieuwsbericht -
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