| BEVERLY,
Mass. — Novemer 30, 2004 — Axcelis Technologies, Inc.
(NASDAQ: ACLS) today announced that it will provide
innovative low energy, single-wafer implant technology
to AMD's new 300mm fab in Dresden, Germany. AMD chose
Axcelis' new single-wafer technology because it is the
only platform that meets the chipmaker's device manufacturing
requirements for well and channel and high-tilt HALO
implant applications in the 90nm to 45nm technology
nodes.
Device
scaling beyond the 90nm technology node drives the
need for lower energy implant processing in all areas
of the transistor. Axcelis has been developing a new
single-wafer platform in anticipation of the industry's
growing need for greater productivity and doping precision
in high-tilt, low energy implant applications. Axcelis
plans to formally unveil the new single-wafer platform
in early 2005.
"Being
the leader in highly productive low energy implant
is the result of our ongoing commitment to technology
development and close customer collaborations. This
approach, coupled with our market insight, enables
us to deliver the most precise and productive tools
for our customers," said Mike Luttati, Axcelis'
chief operating officer. "The inherent design
of our new platform and low energy performance clearly
provided AMD with a solution to meet their current
and future needs. As devices scale, energy, contamination
and angle control play a much larger role, and our
platform excels in these areas."
About
AMD
AMD (NYSE:AMD) designs and produces innovative microprocessors,
Flash memory devices and low-power processor solutions
for the computer, communications and consumer electronics
industries. AMD is dedicated to delivering standards-based,
customer-focused solutions for technology users, ranging
from enterprises and governments to individual consumers.
For more information, visit www.amd.com .
About
Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly,
Massachusetts, provides innovative, high-productivity
solutions for the semiconductor industry. Axcelis
is dedicated to developing enabling process applications
through the design, manufacture and complete life
cycle support of ion implantation, rapid thermal processing
and cleaning and curing systems. Axcelis Technologies
has key technology centers in Beverly, Massachusetts
and Rockville, Maryland, as well as in Toyo, Japan
through its joint venture, SEN. The company's Internet
address is: www.axcelis.com .
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