Tegal Corporation Announces High-K Nano Layer Deposition
Joint Development Project With Sharp Corporation's
Calif.--(BUSINESS WIRE)--Tegal Corporation (Nasdaq:TGAL),
a leading designer and manufacturer of plasma etch and
deposition systems used in the production of integrated
circuits and nanotechnology devices, and Sharp Laboratories
of America have entered into an agreement to collaborate
on a focused joint development program (JDP) to accelerate
the adoption and integration of next generation high-K
The JDP builds on Tegal's patented Nano Layer Deposition
(NLD) technology for depositing ultra thin layers of
new dielectric materials for semiconductor and nanotechnology
device production. The program will be centered at the
Sharp Laboratories of America (SLA) facility in Camas,
Washington and will utilize the Tegal Simplus(TM) NLD
system already installed there.
"We are very excited about the JDP and the opportunity
for Tegal to work cooperatively with Sharp engineers
within their own facilities to further refine and deploy
production solutions based on Tegal's Simplus NLD technology,"
said Michael L. Parodi, Tegal's Chairman, President
and CEO. "NLD holds the promise of enabling high
throughput deposition of critical dielectric layers
needed for semiconductor device scaling. The scaling
of logic and memory devices requires the continuous
thickness reduction of dielectric layers to ensure the
required electrical performance of these devices. New
conformal deposition technologies like NLD are needed
to achieve the aggressive scaling requirements called
out in the recently published Semiconductor Industry
Association's (SIA) International Technology Roadmap
for Semiconductors (2003)."
The Simplus NLD cluster tool is a multi-chamber deposition
platform targeted for barrier, copper seed and high-K
dielectric applications. The market for highly conformal
deposition tools, such as NLD and Atomic Layer Deposition
(ALD), is expected to grow from approximately $100 million
today to over $1.3 billion by 2008 according to the
independent market research firm VLSI Research, Inc.
Tegal announced the completion of the acquisition of
the Simplus NLD product line in December 2003.
Tegal provides process and equipment solutions to leading
edge suppliers of advanced semiconductor and nanotechnology
devices. Incorporating unique, patented etch and deposition
technologies, Tegal's system solutions are backed by
over 35 years of advanced development and over 100 patents.
Some examples of devices enabled by Tegal technology
are energy efficient memories found in portable computers,
cellphones, PDAs and RFID applications; megapixel imaging
chips used in digital and cellphone cameras; power amplifiers
for portable handsets and wireless networking gear;
and MEMS devices like accelerometers for automotive
airbags, microfluidic control devices for ink jet printers;
and laboratory-on-a-chip medical test kits. More
information is available on the Internet at: www.tegal.com
About Sharp Laboratories of America
Sharp Laboratories was established in July 1995 and
is Sharp Corporation's first U.S. facility dedicated
to the research and development of consumer oriented
multimedia communications, digital imaging, digital
video, and mobile computing products and applications.
SLA's new 55,770 square foot building opened in Camas,
Washington in April 1997.
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