France--(BUSINESS WIRE)--April 4, 2005--SUSS MicroTec
(FWB:SMH) today announces a next-generation lithography
tool which could soon replace traditional optical
lithography for the production of nano-scale devices.
SUSS NPS300 Nano Patterning Stepper was developed
within the Sixth Framework Program in cooperation
with the VTT Microelectronics Center during a one-year
project. In March 2004, a four-year European Commission
NaPa project was initiated to develop nano-patterning
methods aimed at integrating and standardizing top-down
miniaturization and bottom-up self-assembly fabrication
approaches. SUSS' partners in the NaPa project are
VTT, NMRC-NIL, NMRC-CMG, mrt, EPFL, IBM & LAAS
who are all developing complementary cutting-edge
technologies including materials, stamps, tools, simulation
NPS300 is a very flexible tool and is available either
as a manually loaded machine or as a fully automated
system. The latter configuration includes fully automated
wafer handling for sizes up to 300 mm and an automated
template pick up capability, allowing different templates
to be printed on same wafer. Optimized for the cost-effective
replication of micro or nanometer scale devices, the
SUSS NPS300 successfully achieves a sub-20 nm imprinting
resolution for cold (UV-NIL) and hot embossing applications.
When equipped with the automatic alignment option,
the NPS300 demonstrates a 250 nm overlay accuracy
and accepts stamps with sizes up to 100 mm and thickness'
up to 6.5 mm.
NPS300 offers various imprinting techniques and is
a cost-effective alternative to high-resolution e-beam
lithography for printing sub-20 nm geometries."
explains Gilbert Lecarpentier, SUSS' Strategic Product
Manager for the NPS300 and goes on to explain "Step
& Stamp Imprinting for Hot Embossing is an innovative
method that has been demonstrated at the VTT Microelectronic
Centre in Finland. This method consists of transferring
the stamp pattern into a thermoplastic embossing material
by controlling heat and pressure. Using in-situ material
dispense and UV curing, the Step & Cure Imprinting
method can be used for Cold Embossing applications."
using stamps or templates rather than optical lithography
for the imprinting, the NPS300 can replicate the tiniest
patterns. Applications include integrated optical
devices (passive devices on diodes, gratings, photo
refractive polymers, back side illumination devices,
etc.), smart materials for microelectronics (sensors,
resonators and transducers), sensors for temperature,
light, molecules, life science as well as 3-dimensional
with this Nano Patterning Stepper, SUSS additionally
offers Mask Aligners for Cold Embossing at wafer level,
a technique where an imprint resist is cured with
UV light, and Substrate Bonders for Hot Embossing
using temperature and pressure as curing parameters.
NPS300 can be seen on our booth #100 in Hall B1 at
Semicon Europa from the 12th to the 14th of April.
Technical Research Centre of Finland is a contract
research organisation involved in many European research
programs and other international assignments. With
its 2800 employees, VTT provides technology and applied
research services for its customers, private companies,
institutions and the public sector. VTT also promotes
technology transfer by creating public research knowledge
and by actively participating in both domestic and
international research in electronics, information
technology, biotechnology, nanotechnology among others.
is about 210 million euros. VTT serves annually over
5000 domestic and foreign customers.
MicroTec is a leading supplier of production, process
and test technology for the semiconductor industry.
SUSS maintains its leadership position with over 7,000
systems installed worldwide. SUSS products include
coating developing systems, 1X full-field lithography
(1XFFL) systems, substrate bonders, device/flip-chip
bonders and probe systems. Headquartered in Munich,
Germany, SUSS has approximately 800 employees worldwide
and provides support from sales and service centers
in North America, Europe, Asia and Japan. SUSS MicroTec
AG is listed in the Tec-DAX segment of the German
SUSS MicroTec AG
Brigitte Wehrmann, +49 89 32007 237