Austin,
TX and Mountain View, CA – (4 October 2005) – Synopsys,
Inc. (Nasdaq: SNPS ),
a world leader in semiconductor design software,
and SEMATECH, the leading semiconductor consortium,
today announced a joint program to develop advanced
optical proximity correction (OPC) models that will
enable the extension of optical lithography.
A key goal of the program, part of SEMATECH's 193
nanometer (nm) Immersion Lithography Extendibility
Project, is to facilitate better understanding of
the challenges in process nodes beyond 45 nm so that
participants can develop software and manufacturing
processes that will meet these challenges. The program
leverages Synopsys' industry-leading Proteus mask
synthesis software.
The program's preliminary modeling results have
been strong, indicating that immersion tools using
a 1.3 numerical aperture (NA) can be image-corrected
for use at the 45-nm half-pitch. The objective is
to eventually enable the extension of immersion lithography
to the 32 nm half-pitch, and extend models for optical
tools with numerical aperture 1.55 and greater.
“ Since advanced immersion tools are just now being
developed, modeling is critical to determining how
far we can go with immersion lithography. The Synopsys
tools have proven useful in developing the OPC models
that will allow us to push the immersion frontier,” said
Shane Palmer, SEMATECH senior technologist and Texas
Instruments assignee. “SEMATECH's project is geared
toward preparing tools for the next generation of
immersion scanner that will use higher index fluids,
NA above 1.3 and full polarization control. The results
will help SEMATECH member companies make informed
decisions about appropriate imaging tools for advanced
technology cycles.”
In
immersion lithography systems, the immersion liquid
(such as pure water) is placed between an exposure
tool's projection lens and a wafer, and the liquid's
refractive properties are used to create higher
resolution images than a “dry” lens system
will allow. Immersion also allows a lens to be designed
with an NA greater than 1 which permits even further
resolution improvement. Accurate modeling of the
optical distortions introduced by these “hyper-NA” projection
systems is required in order to validate designs,
perform OPC, and add reticle enhancement technologies
(RET) that enable high yield in manufacturing.
Synopsys' Proteus software facilitates high-speed
accurate modeling by enabling engineers to simulate
electromagnetic diffraction and scattering through
the photomask. The software also provides the flexibility
for engineers to progress through the various modeling
steps required for immersion lithography. The resulting
silicon image helps process development engineers
better understand the predictability and yield of
their processes.
“Together, Synopsys and SEMATECH are addressing
the escalating need for accurate, high-speed OPC
modeling at the 45 nanometer node,” said Anantha
Sethuraman, vice president of DFM Solutions at Synopsys,
Inc. “We expect this will be one of a number of collaborations
in which Synopsys will link its comprehensive DFM
software solution to technology-leading researchers
like SEMATECH, to advance complex technology issues
such as immersion lithography and help our customers
achieve their production and yield goals at process
nodes beyond 45 nanometers.”
About Synopsys DFM
Synopsys offers the industry's most comprehensive design for manufacturing
(DFM) solution that spans from RTL to mask. Its DFM product family addresses
critical manufacturability and yield issues with its Hercules™ physical verification,
Proteus mask synthesis, CATS® mask data preparation, SiVL® lithography
verification, i-Virtual Stepper™ mask defect dispositioning, patented PSM
technology, and physics-based TCAD suite of simulation products. Synopsys
takes a systematic approach to design for manufacturing that makes intelligent
use of design and manufacturing data throughout its entire flow to help ensure
that designs at 65 nanometers (nm) and smaller geometries will achieve desired
yield goals.
About SEMATECH
SEMATECH
is the world's catalyst for accelerating the commercialization
of technology innovations into manufacturing solutions.
By setting global direction, creating opportunities
for flexible collaboration, and conducting strategic
R&D, SEMATECH delivers
significant leverage to our semiconductor and emerging
technology partners. In short, we are accelerating
the next technology revolution . For more information,
please visit our website at www.SEMATECH.org .
SEMATECH, the SEMATECH logo, AMRC, Advanced Materials
Research Center, ATDF, the ATDF logo, Advanced Technology
Development Facility, ISMI and International SEMATECH
Manufacturing Initiative are servicemarks of SEMATECH,
Inc.
About Synopsys
Synopsys, Inc. (Nasdaq:SNPS) is a world leader in
electronic design automation (EDA) software for semiconductor
design. The company delivers technology-leading semiconductor
design and verification platforms and IC manufacturing
software products to the global electronics market,
enabling the development and production of complex
systems-on-chips (SoCs). Synopsys also provides intellectual
property and design services to simplify the design
process and accelerate time-to-market for its customers.
Synopsys is headquartered in Mountain View, California
and has offices in more than 60 locations throughout
North America, Europe, Japan and Asia. Visit Synopsys
online at http://www.synopsys.com/ .
Forward Looking Statements
This press release contains forward-looking statements within the meaning of
the safe harbor provisions of Section 21E of the Securities Exchange Act
of 1934, including statements regarding the expected benefits of the joint
program to develop advanced optical proximity correction (OPC) models. These
statements are based on Synopsys' and SEMATECH'S current expectations and
beliefs. The actual results of the program could differ materially from those
implied by these statements as a result of unforeseen difficulties in completing
development of the models, uncertainties attendant to any new joint technology
development project and certain statements contained in the section of Synopsys'
Quarterly Report on Form 10-Q for the fiscal quarter ended July 31, 2005
entitled “Factors That May Affect Future Results.”
Synopsys, CATS and SiVL are registered trademarks
of Synopsys, Inc. Hercules and i-Virtual Stepper
are trademarks of Synopsys, Inc. Any other trademarks
or registered trademarks mentioned in this release
are the intellectual property of their respective
owners.
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